Planar magnetrons

Magnetron sputtering is a technology for thin films depositing in a vacuum chamber and in a working gas using cathode sputtering of the target material in crossed electric and magnetic fields

Circular planar magnetrons

Circular planar magnetrons

Used in vacuum lab and batch equipment with substrate sizes up to 250 mm
Rectangular planar magnetrons

Rectangular planar magnetrons

Used in vacuum installations of periodic and continuous operation with substrate sizes up to 3 meters or more