Linear anode layer accelerators

Linear anode layer accelerators

Linear anode layer accelerators

Ion-beam treatment of the surface defined as a certain effect resulting from applying ion beams (of a certain characteristic with defined energy and ion density) to the substrate.  
The ions of the operation gas are generated within crossed electrical and magnetic fields and their acceleration and energy are resulting from the difference of potentials within anode-cathode. Ions resulting from the working gas ionization together with drifting electrons within closed magnetic field create an anode layer. Devices based on these physical principles are called anode layer accelerators.

Application:
Anode layer accelerators are applied in a variety of vacuum systems (as batch and in-line types) within  different  substrate treatment processes for large substrates from 100 mm to 3250mm width. The applications are: cleaning, polishing and activation of the surface, selected and controlled ion-beam etching, film depositions on the substrate, ion-beam assist during deposition. Preliminary ion-beam surface cleaning is most effective when applied before the  deposition process  in one vacuum cycle.   

Main applications:
-  cleaning and activation of the surface;
-  controlled polishing;
- deposition of functional thin films of high density: protective, dielectric, diamond-like, complex layer compositions from  a variety of materials;
- precise etching (minimal elements sizes from 0.2 microns with 0.05 microns accuracy; width-to-height step ratio more than 30:1; adjusting of beam angle to the treated surface helps to control step profile and trench configuration).

Technical data:

Parameters Basic Options
Source type accelerator with anode layer
Working pressure 0,009 ÷ 0,15Pa
Target material any
Length of the linear part 100, 330, 550, 900, 1100, 1250, 3250 by request
Target length section 70 mm×{145,375,595}
section 125 mm ×{1080,1280,1430,3430} 
by request
Magnetic system Permanent magnets NdFeB+2xNi
Gas distributor Yes
Cooling Indirect Direct
Anode voltage 0,8 ÷ 2,5 kV 0,8 ÷ 5 kV
Mean ion energy 0,35 ÷ 1,5keV 0,35 ÷ 3keV
Current density, mA/cm slit length < 2,1mA/cm < 4,2mA/cm
Gas flow (depends on slit length) 5…750 cm3/min
Mean time between maintenance (mtbm) 120 h
Coolingz water
Cooling water temperature 18...25 °C
Water pressure 2..4 bar
Water flow >0,7 l/min/kW
Working gas Ar, O2 and other
Working gas purity 99,99 %