RF IBS for sputtering and assistance, Automatic Optical Monitoring, Multiple choice of substrate holder (single disk, planetary, High speed), Load-lock

The I-Photonics IBS coater LIDIZ 700 is designed to produce cutting-edge optical interference coatings as band pass filters, multispectral filters, beam splitters and ultra low-loss laser mirrors.

With its configurable options on substrate holders, its load-lock system and its unique fully automated high precision optical monitoring system LIDIZ can be configured for different needs to fully provide all advantages of IBS technology as high film purity, the most stable deposition rate at lowest optical losses.

For coating examples and detail information about LIDIZ please download the LIDIZ CATALOGUE.

Installation area

3540×1840×2000 mm (L×W×H)

Equipment weight

4500 kg

Sputtering source

RF Grid IBS with RF neutralizer

Assistance source

RF Grid IBS with RF neutralizer

Substrate Holder

and coating area

Single disk Ø320 mm (area 800 cm2)

Planetary 4x Ø 210 mm (area 1380 cm2)

and planetary 3×Ø320 mm (area 2400 cm2)


For Single disk substrate holder

Coating uniformity

≤±0.25% for planetary 4x Ø 210 mm

≤±0.5% for single disk Ø320 mm

≤±0.5% for planetary 3×Ø320 mm (area 2400 cm2)

Process monitoring system

Automatic optical monitoring system OCP:

OCP Broadband,

OCP Singlewave,

OCP Duo (Broadband and Singlewave 2 in 1)

Substrate materials

glass ceramics, chromatic and achromatic optical glass, quartz, potassium fluoride, sapphire, etc.

Number of targets, max.

4 pcs

Sputtering targets

Ti, Ta, Nb, Zr, Hf, AI, Si, SiO2 etc.

Coating rate

Up to 5 Å /sec (material dependent )

Substrate temperature in the process

(without heater)

<100 оС

Substrate heating system temperature

<250 оС

Substrate heating uniformity

± 2 оС

Ultimate pressure

2E-5 Pa

Time to reach Ultimate pressure

8 hours

Process start pressure

8E-4 Pa

Time to reach process start pressure

30 min (without load-lock)

15 min (with load-lock)

Pumping system

Dry mechanical pump & cryogenic pump

Turbo molecular pump (optional)