Plasma Assisted Reactive Magnetron Sputtering (PARMS) system

Vacuum system Meridian is an effective system for high-rate deposition of high-precision optical coatings for a wide range of applications. Meridian system helps to obtain thin films of a variety of materials with high accuracy and excellent quality. Optical control allows to make the processes fully automatic and increase the yield significantly. 

Key benefits:

  • Long throw sputtering configuration enabling particle free coating processes
  • Sputter-Up configuration
  • High-yield dual-magnetron AC sputtering systems
  • Long life RF plasma sources for precleaning and assisting
  • On-substrate direct Optical monitoring system I-Photonics OCP
  • Double rotation planetary substrate holder allows mounting of different substrate sizes (200, 250 and 300mm)


  • Ultra narrow band pass filters
  • Multizone filters
  • Steep-edge filters
  • Single- and multi-notch filters
  • Laser mirrors
  • Thin-film polarizers
  • Beam splitters

Technical data

Sputtering source HY planar circular magnetrons
Assisting source RF plasma source Copra DN250 CCR
Capacity Dual rotation planetary holder
10 x 200 mm 
Coating uniformity <+/-0.2% 
Sputtering materials Ta2O5, SiO2, HfO2, Al2O3, Nb2O5
Coating rate Up to 6 A/sec (material dependent)
Monitoring system Automatic optical monitoring system I-Photonics OCP
Process temperature <250 oC
Pumping system Dry mechanical pump
Turbomolecular pumps
Ultimate pressure 8e-4 Pa
Time to reach start process 45 min
Installation area (LxWxH) 3790x3560x2450 mm
Equipment weight 3400 kg