Substrate holder: Dome ø620 mm, Planetary 3x ø250 mm. Automatic Optical Monitoring. 2xE-gun, Resistance evap., End hall assist, RF Plasma Assist Source.

The most compact PIAD coater provides all flexibility of ORTUS platform with options in technologycal devices, substrate holders, process control and accessories.
With dome diameter of 620 mm and possibility to install other substrate holders it is optimized for R&D and small scale production.

For detailed information about our ORTUS IAD coater portfolio and its coating capabilities please download the ORTUS CATALOGUE.

Configuration options:

1. Substrate holder

  size loading cap. of 1"
for reff.
Thickness U% for all loading area Max single substrate size
Dome type ø620 mm 228 ±1.5% 220 mm
Planetary 3 x ø250 mm 132 ±1% 250 mm


2. Technological devices

     - Electron Beam Evaporation (EBE)
          3 different sizes EV M-6, EV M-8, EV M-10
          Customized crucibles, 1 ... 12 pockets
          Max. quantity : 2 pcs

     - Cleaning and Assistance sources
          End-Hall ion source with Ion Current Density up to 1 mA/cm^2
          Accelerator with anode Layer (Ion Current Density up to 4.2 mA/cm^2)
          Copra: RF Plasma Assist Source (Ion Current Density up to 2.5 mA/cm^2)
          Max. quantity : 1 pcs

     - Resistance evaporation source
          Max. quantity : 1 pcs together with 2 EBE

3. Coating process control

     - Rate and thickness control system (quartz control)

     - Optical process monitoring system OCP
          OCP Singlewave for monochromatic monitoring

4. Accessories

     Substrate heating system

          - IR lamps
          - Tubular heater