OCP Singlewave

OCP Singlewave

Deposition process monitoring at the selected wavelengths

OCP ADVANCED OPTICAL MONITORING SYSTEMS.pdf

The high speed digitizing of the measured data allows to obtain a stable signal even at minimum measurement times, which makes it possible to monitor the process in equipment with high-speed linear motion of the test glass. The operation with baseline signal calibration avoids any signal changes, not directly connected with the film deposition process on the surface of the object under control. The developed mathematical algorithm allows to approximate measured data with at worst insignificant errors. That makes it possible to find  the stop layer point with a hundred percent accuracy and send a stop layer signal to the vacuum equipment control. This precision allows to carry out deposition process from the beginning to the end automatically. A wide range of options allow you to configure OCP Singlewave to satisfy all the requirements of the process are working on.

Spectral subrange, nm

200-380

380-1100

1100-1650

1650-2500

Spectral resolution, nm

0.8

0.8

1.6

3.2

Wavelength accuracy, nm

±0.2

±0.2

±0.4

±0.8

Wavelength repeatability, nm

±0.1

±0.1

±0.2

±0.4

Monitor types

Intermittent (Direct): Transmission

Continuous (Indirect by test glass): Transmission, Reflection, Backside Reflection

Baseline Stability, %

±0.1%/hour

±0.1%/hour

±0.25%/h

±0.75%/h

Dark Noise, %

±0.01@550nm

±0.01@550nm

±0.1@1550nm

±1@2100nm

Stray light, %

0.3@250nm

0.05@550nm

0.1@1550nm

0.1@2100nm

Built-in PC

Yes

Light Source

Deuterium lamp

DC-stabilized Quartz Tungsten Halogen

Detector

Si

Si

IGA

IGA

Software for thin film design

OptiLayer, OTF STUDIO, TFCalc,

MS Excel, Essential Macleod

Data transfer

OPC UA, Modbus TCP/IP

Other by request

Test glass changer

8 positions test glass changer integrated with 4 position cooled quartz crystal changer

The OCP supports the most popular softwares for optical design creation as OptiLayer, OTF STUDIO, TFCalc, Essential Macleod as well as MS Excel. The created optical design is uploaded to the OCP where it is possible to see the coating structure layer by layer. The user friendly interface of OCP software provides all visual information in order to operate the process in automatic or in manual mode.