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Designing and manufacturing of vacuum coating equipment for: optoelectronics, microelectronics,
photovoltaic, thermal processing in vacuum.
Vacuum Coating Systems
I-Photonics key areas in equipment development Magnetron Sputtering, Ion-beam Sputtering and Cleaning, Electron-beam evaporation based with Plasma Ion-Assisted Deposition (PIAD), PECVD, Diamond-like carbon (DLC) coatings.
Thin-film Coating
The accumulated experience of our team in process integration and the methodology of thin film coating has helped I-Photonics to become specialized to provide own “in house” coating services as well.
Our Products
ORTUS 700
Substrate holder:
Dome ø620 mm,
Planetary 3x ø250 mm.
Automatic Optical Monitoring.
2xE-gun, Resistance evap., End hall assist, RF Plasma Assist Source.
Dome ø620 mm,
Planetary 3x ø250 mm.
Automatic Optical Monitoring.
2xE-gun, Resistance evap., End hall assist, RF Plasma Assist Source.
ORTUS 900
Substrate holder:
Dome ø800 mm,
Planetary 4x ø327 mm.
Automatic Optical Monitoring.
2xE-gun, Resistance evap., End hall assist, RF Plasma Assist Source.
Dome ø800 mm,
Planetary 4x ø327 mm.
Automatic Optical Monitoring.
2xE-gun, Resistance evap., End hall assist, RF Plasma Assist Source.
ORTUS 1100
Substrate holder:
Dome ø995 mm,
Planetary 4x ø387 mm.
Automatic Optical Monitoring.
2xE-gun, 2XResistance evap., RF Plasma Assist Source.
Dome ø995 mm,
Planetary 4x ø387 mm.
Automatic Optical Monitoring.
2xE-gun, 2XResistance evap., RF Plasma Assist Source.
ORTUS 1500
Substrate holder:
Dome ø1390 mm,
Planetary 4x ø590 mm.
Automatic Optical Monitoring.
2xE-gun, 2xResistance evap., RF Plasma Assist Source.
Dome ø1390 mm,
Planetary 4x ø590 mm.
Automatic Optical Monitoring.
2xE-gun, 2xResistance evap., RF Plasma Assist Source.
LIDIZ 700
RF IBS for sputtering and assistance,
Automatic Optical Monitoring,
Multiple choice of substrate holder (single disk, planetary, High speed),
Load-lock
Automatic Optical Monitoring,
Multiple choice of substrate holder (single disk, planetary, High speed),
Load-lock
Rectangular planar magnetrons
Used in vacuum installations of periodic and continuous operation with substrate sizes up to 3 meters or more
Cylindrical rotary magnetrons
Used in a vacuum equipment of periodic and continuous operation with substrate sizes up to 3 meters or more
Cylindrical stationary magnetrons
Used in vacuum installations of periodic operation with substrate sizes up to 3 meters or more
Multi-zone filters
Several filters combined on the same substrate, but separated into separate zones
Single and multi-wavelength antireflection coating
Aperture coatings for one narrow spectral band or several bands
Upcoming events
Laser and Photonics Taiwan 2024
Taipei, Taiwan
21 - 24 August 2024
19th International Conference on Plasma Surface Engineering
Erfurt, Germany
02 - 5 September 2024
SEMICON Taiwan 2024
Taipei, Taiwan
04 - 6 September 2024
13th CIRP Conference on Photonic Technologies
Fürth, Germany
15 - 19 September 2024
W3+ FAIR JENA 2024
Jena, Germany
25 - 26 September 2024
VISION 2024
Stuttgart, Germany
08 - 10 October 2024
Glasstec 2024
Düsseldorf, Germany
22 - 25 October 2024
OPTO Taiwan 2024
Taipei, Taiwan
23 - 25 October 2024
