LIDIZ platform

IBS evaporation equipment for VIS, IR optics and Lasers

LIDIZ 700

RF IBS for sputtering and assistance,
Automatic Optical Monitoring,
Multiple choice of substrate holder (single disk, planetary, High speed),
Load-lock

LIDIZ 1100

RF IBS for sputtering and assistance,
Automatic Optical Monitoring,
Increased Throughput

The LIDIZ IBS coater line is the result and embodiment of 50 years’ experience in Ion Beam Sputtering (IBS) technology. IBS technology is well known for its extremely low-loss optical coatings. LIDIZ IBS Sputtering Systems represent state of the art tools for the deposition of optical coatings for a wide range of applications. LIDIZ has been designed to produce thin films from a wide range of materials with high accuracy and excellent quality.

Our unique self-developed optical process control system OCP Singlewave and OCP Broadband with real-time optimization of the optical coating process enables a tight control of complex filter coatings with high accuracy and repeatability.

Main Features:
- RF Grid high-power IBS for deposition with RF neutralizer to ensure high deposition rates and film quality
- RF IBS assist with RF neutralizer to ensure accurate control of the stoichometry and enables substrate pre-cleaning and activation
- Automatic Optical Monitoring system OCP in various configuration:
OCP Broadband
OCP Singlewave
OCP Duo with 2 monitor types in one system
OCP Laser
- Multiple choice of Substrate holders to provide maximum product flexibility and to match productivities needs:
Single Disk
Planetary system
High speed single disk

Coatings Applications:
- Laser Mirrors
- Bandpass filters
- Multi-band bandpass filters
- Notch filters
- Multi-notch filters
- Rugate filters
- Low scatter and absorption loss optics
- Thin-film polarizers
- Wide-angle antireflection coatings
- Coatings on fibers
- AR coatings on laser diodes
- Coatings with low defects
- Low loss HR or AR coatings (Total loss is smaller than 10 ppm)
- Multi-layers filters (>100 layers) with high requirements to precision and thickness control

For details about configuration please see description for each model and contact us.

For detailed information about our LIDIZ coater portfolio and its coating capabilities please download the LIDIZ CATALOGUE.

Technology

Ion Beam Sputtering (IBS)

Ion Beam Sputtering (IBS) or Ion Beam Deposition (IBD) is a kind of Physical Vapor Deposition (PVD) technology that uses ion source to bombard targets for physically removing material from the target which is deposited on the substrate surface. The main advantage of IBS is a possibility to deposit very dense and high quality thin films with extremely high thickness precision and stability compared to other PVD technologies.