DIAMANTA vacuum system is designed for the deposition of wear resistant diamond-like carbon (DLC) coatings on silicon and germanium substrates. These DLC coatings are antireflective in IR range of 3-5 µm as well as in the 7-14 µm range. The deposition method is a plasma enhanced chemical deposition of carbon from the gas phase stimulated by plasma of an ion-beam source. IR optic products are often used in the most extreme operating conditions, where an AR coating is used in combination with a DLC coating on the front side of external lenses.
To be used in:
- Night vision devices
- Thermal imagers
- Sensors
- Pyrometers
- Optical systems for objectives
- R&D
FEATURES :
- Unique I-Photonics method of DLC coatings deposition
- Load-lock vacuum chamber
- Single wave optical monitoring system
- Can be customized
TECHNOLOGICAL DEVICES:
- Ion-beam sputtering source
- Ion-beam cleaning source
| Maximum substrate size | 370х420 mm |
| Maximum coating thickness uniformity | ± 3,0% |
| Maximum quantity of substrates of 30 mm diameter per one run |
116 pcs |
| Ultimate residual pressure in the clean vacuum chamber | 5х10-4 Pа |
| Coatings control | Single wave optical monitoring system |
For detailed information please download the DLC catalogue.