The biggest ORTUS with the highest loading capacity.
Distinguishing features:
- suitable for coating on large 3D shapes substrates
- suitable low temperature evaporation for coating on plastic substrates
For detailed information about our ORTUS IAD coater portfolio and its coating capabilities please download the ORTUS CATALOGUE.
Configuration options:
1. Substrate holder
| size | loading cap. of 1" for reff. |
Thickness U% for all loading area | Max single substrate size | |
| Dome type | ø1390 mm | 1075 | ±2% | 580 mm |
| Planetary | 4 x ø590 mm | 850 | ±1% | 590 mm |
2. Technological devices
- Electron Beam Evaporation (EBE)
3 different sizes EV M-6, EV M-8, EV M-10
Customized crucibles, 1 ... 12 pockets
Max. quantity : 2 pcs
- Cleaning and Assistance sources
Luch: Accelerator with anode Layer (Ion Current Density up to 4.2 mA/cm^2)
Copra: RF ion source (Ion Current Density up to 2.5 mA/cm^2)
Max. quantity : 1
- Resistance evaporation source
Max. quantity : 2 pcs together with 2 EBE
3. Coating process control
- Rate and thickness control system (quartz control)
- Optical process control system OCP
OCP Broad Band for spectral control
OCP Single Wave for monochromatic control
4. Accessories
Substrate heating system
- IR lamps
- Tubular heater
