It's necessary to match a generator output resistance with cable wave resistance and load impedance while operating on high frequency. Matching means equivalence of load impedance and cable wave resistance to generator output resistance. Equivalence of these values makes reflected power decreasing to zero, the power set by generator diffuses fully into load. If load impedance varies from generator output resistance, the set power diffuses partialy into generator outpur circuit.
Load impedance transforns in macthing box by including reactive components into circuit - capacities and inductivities. A scheme of their turning on and ratings chosen according to impedance of the technological device, generator operating frequency and its resistance.
Application:
Matching load is intended for matching of RF generator output resistance with cable wave resistance and load impedance in order to decrease loses in power supplying in high frequency power circuits of the sources of inductive-coupled and capacity-coupled plasma.
Main tasks:
- AMIL is intended for matching of RF generator output resistance with cable wave resistance and load impedance of inductive-coupled plasma;
- AMCL is intended for matching of RF generator output resistance with cable wave resistance and load impedance of capacity-coupled plasma.
Technical data:
| Parameters | Basic |
| Working freq. | 13.56MHz |
| Max. working power | 3000W |
| Input impedance | 50Ω |
| Input connector | 7/16 |
| Output connector | 7/16 or busbar prepared |
| Control | RS-485 |
| Reflected power | < 1% |
| Adjustable elements | Vacuum Variable Capacitors |
| Cooling | Forced air |
| Supply voltage | 110-220 V; 50-60 Hz |
| Power consumption | <50 VA |
| Dimentions | 344x288x104 |
| Weight | 7,5 kg |
| Model: AMIL-3000 Matching load for ICP (inductors) |
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| Model: AMCL-3000 Matching load for CCP (magnetrons) |
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